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Idle Mode for Abatement Systems

Photonics.com
Dec 2007
Edwards Vacuum Inc.Request Info
 
WILMINGTON, Mass., Dec. 14, 2007 -- Edwards (formerly BOC Edwards) announced an "idle mode" is now available for its Atlas and TPU lines of combustion exhaust management systems.

Idle mode allows the abatement system to go into a standby mode with reduced fuel and water consumption when exhaust is not flowing from attached process equipment. The new capability is part of a continuous improvement program initiated by Edwards to reduce the operating costs and environmental impact of its vacuum and abatement systems, the company said.

EdwardsIdle.jpgIn idle mode, the system only consumes fuel to maintain the pilot flame and water to refresh the recirculation system once an hour. On an Atlas, these levels represent a reduction of 89 percent for fuel and nearly 100 percent for water. Idle mode can also be provided as an upgrade to existing TPU systems where even higher percentage fuel reductions can be made. With equipment utilization typically 85 percent or less (idle 15 percent or more), cost savings can be substantial, the company said. The system monitors signals from process equipment to determine active and idle status. It enters idle mode automatically and can return to full operational status within 10 seconds.

"One of our corporate initiatives is to help our customers reduce the amount of energy and other utilities consumed by vacuum and abatement systems," said Nigel Hunton, CEO, Edwards. "This new idle mode is just one step in a continuing effort to cut cost of ownership and the environmental impact of our products. When the Atlas was introduced earlier this year, it doubled the efficiency of the burner. Other examples include advanced motor controls, optimized mechanical designs and active utility management for our pumps."

Edwards said its Atlas line uses less energy than previous-generation systems. It provides exhaust management at a minimal cost for CVD and etch processes (PECVD, HDPCVD, WCVD, etc.) and is suitable for treating exhaust streams containing fluorine (PFCs), SiH4, TEOS, WF6, NH3, and others.

The Atlas combines a highly efficient, inward-fired combustion chamber and a wet scrubber to provide exceptional abatement performance with excellent powder handling, the company said. It is available with 1 to 6 inlets and with various options including temperature monitoring. The Atlas TPU version is designed for PFC and ClF3 gas treatment; the Atlas Kronis for the treatment of low-k CVD exhaust streams.

The new idle mode is standard on all Atlas systems, and is available as an upgrade for the TPU line and existing systems in the field.

For more information, visit: www.edwardsvacuum.com

Edwards
301 Ballardvale St.
Wilmington, MA 01887
Phone: (978) 658-5410
Fax: (978) 657-6546


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