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Photonics Spectra
Feb 2008
Veeco Instruments Inc.Request Info
Designed to meet critical dimension, depth, sidewall angle and chemical mechanical planarization metrology requirements for 45- and 32-nm-node semiconductor processes, the InSight 3DAFM atomic force microscope manufactured by Veeco Instruments Inc. performs high-resolution nondestructive 3-D measurements. It provides production-based reference metrology on crucial CD elements encountered in lithography and advanced etch processing, including gate, shallow trench isolation, dual-damascene structures and line-edge variation. The company says that, at a production rate of 30 wafers per hour, the device provides three times the throughput and twice the measurement accuracy and precision of its previous models. Features include preloaded tip cassettes for ease of use and coated probes for improved tip lifetime.


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Basic Sciencechemical mechanical planarization metrologyindustrialmetrologyMicroscopyNew ProductsVeeco Instruments Inc.

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