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FilmTek Autoloader, CD

Photonics.com
Apr 2008
Scientific Computing InternationalRequest Info
 
CARLSBAD, Calif., April 30, 2008 -- Scientific Computing International (SCI) has introduced a wafer autoloader option and a CD for tabletop FilmTek metrology models.

SCI said the FilmTek autoloader is designed as a cost-effective option to increase instrument throughput and automation while avoiding the price and complexity of a fully automated, stand-alone system. With a small footprint, the FilmTek autoloader has a load/unload cycle time on the order of a few seconds and dramatically increases wafer throughput for economical tabletop instruments. The autoloader option is available for 4-to 8-in. wafer sizes and is compatible with all tabletop FilmTek instruments.
SCIFilmtek.jpg
SCI's FilmTek autoloader.
The FilmTek CD, for nondestructive optical CD and thin-film metrology applications, accurately and simultaneously determines top and bottom linewidth, sidewall angle including negative slope, and trench depth, in addition to film thickness and index, the company said. Based on normal incidence ellipsometry, the FilmTek CD provides highly accurate measurements with fast data acquisition times.

The CD includes proprietary diffraction software with real-time optimization. In what SCI said is an industry first, that real-time optimization allows the user to easily measure unknown structures with minimal setup time and recipe development while avoiding the time and complexity associated with library generation.

FilmTek CD provides detailed profile information for gate and shallow trench isolation (STI) structures, as well as contact holes, vias, and deep isolation trenches. It can also measure depth for a single trench structure. The normal incidence ellipsometric design makes the FilmTek CD ideally suited for the extremely small linewidths encountered at the 45-nm and 32-nm technology nodes, according to the SCI.

Available as an economical benchtop unit or as a fully automated stand-alone system with cassette-to-cassette wafer handling, FilmTek CD can be configured to suit a range of budgets and end-use applications, the company said.

For more information, visit: www.sci-soft.com; e-mail: info@sci-soft.com

Scientific Computing International
6355 Corte Del Abeto, Suite C-105
Carlsbad, CA 92009
Phone: (760) 930-3992
Fax: (760) 930-3994



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autoloaderautomationbenchtopCDdiffractionellipsometricFilmTekmetrologynanophotonicsProductsScientific Computing InternationalSoftwareSTItabletopTest & Measurementthin-filmthroughputtrenchesWafers

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