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Nanopositioning stages

May 2008
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
PI.jpgPI (Physik Instrumente) LP has expanded its PIHera family of compact X, X-Y, Z and X-Y-Z flexure-guided piezo nanopositioning tables with the addition of models with travel ranges up to 1800 μm. The precision closed-loop stages with travel ranges from 50 to 1800 μm can be used for scanning probe applications (surface metrology), static positioning and quality assurance. Most PIHera stages provide subnanometer resolution. The 1800-μm versions achieve 3-nm resolution in closed-loop operation. The compact size is achieved with a friction-free and stiff flexure system, which also provides rapid response and guiding accuracy. The stages are equipped with noncontact capacitive sensors and long-life multilayer piezoelectric linear actuators.


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BiophotonicsBreakthroughProductsflexure-guided piezo nanopositioning tablesmetrologyPI (Physik Instrumente) LPSensors & Detectorssurface metrology

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