Interferometer Copes with Environment

Renishaw Inc.

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•   ±0.05-ppm accuracy
•    0 to 40 °C temperature range
•    1-nm linear resolution

The XL-80 laser measurement system introduced by Renishaw plc offers high-performance calibration for motion systems, including coordinate measurement machines and machine tools. Key features are its speed, accuracy and portability.

The interferometers support modes such as linear, angular and straightness measurements. A stabilized laser source is required to deliver high precision and accuracy. The frequency stability of the laser used here is specified as ±0.05 ppm over one year and ±0.02 ppm over one hour.

In addition, the XC-80 compensator plays a key role in the XL system’s measurement accuracy. Featuring intelligent sensors that process the readings at the source, the compensator accurately measures air temperature, air pressure and relative humidity. As a result, the ±0.5-ppm linear measurement accuracy is maintained from 0 to 40 °C and over the full air pressure range.

Other specifications include 1-nm linear resolution (even at maximum velocity), 4-m/s maximum travel velocity and 7 s between each automatically updated environmental compensation. The dynamic capture rate is 50 kHz, and an 80-m linear range is standard. Two software packages are available: The LaserXL, which includes modules for linear, angular, rotary axis, flatness, straightness and squareness measurements and the QuickViewXL. The latter is a tool for research and development because it enables quick and easy investigation, review and characterization of motion systems.

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Published: August 2008