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High Performance Spectrograph

Photonics.com
Sep 2008
Verity Instruments Inc.Request Info
 
CARROLLTON, Texas, Sept. 11, 2008 – Verity Instruments Inc. has released the SD1024FH super high performance spectrograph for semiconductor process control applications.

The spectrograph optimizes signal to noise performance via increased optical throughput, a data acquisition scheme, signal processing and system noise control. The 200 to 800 nm spectral range employs a 1024-element, scientific-grade thermoelectrically cooled CCD sensor designed specifically for challenging endpoint applications. Verity-Instruments-Spectrog.jpg

The sensor features UV response, stability against degradation under UV exposure, high sensitivity and a wide dynamic range. It is also supplied with the company’s SpectraView application software.

Applications include low exposed area contact, ion beam and photomask etch.

For more information, visit: www.verityinst.com

Verity Instruments Inc.
2901 Eisenhower Street
Carrollton, TX 75007
Phone: (972) 446-9990
Fax: (972) 446-9586



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