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PHOTOLITHOGRAPHY STEPPER

Photonics Spectra
Oct 2008
Rudolph TechnologiesRequest Info
 
AzoresCorp.jpgAzores Corp. has announced its Model 8700 PanelPrinter system for flat panel display Gen 3.5 applications. The photolithography stepper is based on proprietary step-and-repeat technology and includes a low-distortion lens in a compact footprint that measures 3.4 × 2.9 m. The system can be configured with two lens options: the 18709i lens with a resolution of 2.5 μm and a depth of focus of 30 μm, or the 18715i lens with 1.5-μm resolution and a 9-μm depth of focus. Both feature an image field diameter of 187 mm and a magnification ratio of 1.253.


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