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Nanopositioning Stage

Photonics Spectra
Sep 2009
piezosystem jena GmbHRequest Info
piezosystem_jena.jpgThe PK line of X-Y nanopositioning and nanoscanning stages unveiled by piezosystem jena Inc. offers 100 × 100-mm clearance, flatness, parallel kinematics and configurability. Measuring 15 mm high, the stages achieve subnanometer positioning accuracy. Actuation can be performed with any of the company’s PX or nanoX elements, and the stroke range goes up to 700 μm. Built with a frame-in-frame support, the stage has an inner frame that is suspended in the outer one, resulting in dual guidance. The stages have two kinds of optionally integrated metrology, and the company offers a number of options for materials, including nonmagnetic.


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dual guidanceflatnessframe-in-frame supportmetrologynanopositioning stagesnanoscanningNew Productsparallel kinematicspiezosystem jenaPK linesubnanometer positioning accuracyTest & MeasurementX-Y

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