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Piezocube

Photonics Spectra
Jun 2010
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
 
PI (Physik Instrumente) GmbH & Co. KG has introduced a piezocube for 3-D structuring applications. The NanoCube P-611 X-Y-Z nanopositioning system’s travel ranges are up to 100 x 100 x 100 μm. It is driven by piezo actuators and achieves resolutions of up to 0.2 nm at millisecond response times and with nanometer repeatability. Vacuum-compatible, it operates over a wide temperature range. Applications include semiconductor manufacturing, optical metrology, micromachining, photonics and manufacturing of minute polymer and protein structures. The cube sides measure 44 mm, facilitating integration.


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MORE FROM PHOTONICS MEDIA
3-D strucuturingCubeindustrialmetrologymicromachiningNanoCube P-611nanometerNanopositioningNew Productsoptical metrologyopticsphotonicsPhysik InstrumentePIpiezopiezo actuatorpiezocubepolymerprotein structureRepeatabilitysemiconductorsemiconductor manufacturingTest & Measurementthree-dimensionaltravel rangevacuum-compatibleX-Y-Z

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