Piezo Stage
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
The P-563.3CD PIMars stage from PI (Physik Instrumente) L.P. is
a piezo scanning and nanomanipulation system. Enabling precision motion control
with subnanometer resolution and 340 x 340 x 340-μm travel in the X-Y-Z axes,
it is suitable for micromanufacturing, biotechnology, nanotechnology, scanning microscopy,
and semiconductor and data-storage test equipment applications. The instrument incorporates
high-force solid-state piezo actuator drives, frictionless flexure guiding systems,
absolute measuring capacitive position sensors and a 66 x 66-mm clear aperture.
Ultrahigh-vacuum versions up to 10–9 hPa are available as well as Invar, Super-Invar
and titanium models.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: August 2010
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