Auto Gapping System
CyberOptics Corp.Request Info
CyberOptics Semiconductor Inc.’s WaferSense Auto Gapping
System, the AGS300, is available in 300- and 200-mm form factors. It measures gaps
that are critical to the outcome of semiconductor processes such as thin-film deposition,
sputtering and etching. Consisting of three capacitive distance sensors, the system
measures the gaps between showerheads and pedestals at three points that define
a plane to ensure accurate and reproducible equipment setups. Using the system,
engineers can better control gap uniformity and magnitude with high stability over
time. It provides wireless measurements with first-film check rates to better than
99% accuracy, and it measures gaps at three points with ±25-μm accuracy
within four hours of field offset calibration. Gap resolution is ±5 μm.
https://www.cyberoptics.com
/Buyers_Guide/CyberOptics_Corp/c3317
Published: September 2010
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