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Auto Gapping System

Photonics Spectra
Sep 2010
CyberOptics Corp.Request Info
 
CyberOptics Semiconductor Inc.’s WaferSense Auto Gapping System, the AGS300, is available in 300- and 200-mm form factors. It measures gaps that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etching. Consisting of three capacitive distance sensors, the system measures the gaps between showerheads and pedestals at three points that define a plane to ensure accurate and reproducible equipment setups. Using the system, engineers can better control gap uniformity and magnitude with high stability over time. It provides wireless measurements with first-film check rates to better than 99% accuracy, and it measures gaps at three points with ±25-μm accuracy within four hours of field offset calibration. Gap resolution is ±5 μm.


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