Air-Bearing Stages
MKS/NewportRequest Info
Newport Corp. has announced the SinguLYS family of single-axis
air-bearing stages. The new stage and bridge configurations combine high performance
with modularity, making them suitable for single-axis, split X-Y and gantry applications.
The SinguLYS S-370 stage is manufactured from silicon carbide ceramic components.
The body’s rigid and compact footprint with three-point mounting allows this
stage to be used in tight spaces without the need for large, lapped mounting surfaces
to maintain a precise trajectory. The SinguLYS B-1200 air-bearing bridge features
a proprietary ceramic beam that is three times lighter than steel and offers triple
the stiffness of granite. When used to replace a steel or granite-based design in
an existing or next-generation tool, its properties can improve acceleration and
decrease settling times, which increases throughput and accuracy with minimal system
redesign. Specially designed for frictionless operation, both the S and B series
products are sturdy and reliable, and they require no maintenance or lubrication.
https://www.newport.com
/Buyers_Guide/MKS_Newport/c10218
Published: October 2010
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