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SEM Sample Cleaning System

BioPhotonics
Feb 2011
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Hitachi High-Technologies Corp.’s ZONESem desktop scanning electron microscope (SEM) sample cleaning system is designed for cleaning and storing electron microscopy samples in readiness for high-quality imaging and analysis. It uses a nondestructive UV cleaning process to quickly remove surface hydrocarbons from scanning electron microscope samples. The system simplifies high-resolution and/or surface imaging using secondary electrons, backscattered electrons and scanning transmission methods by removing surface hydrocarbon layers that could cause focusing and astigmatism difficulties that would obscure surface and edge detail. Samples prepared in this way offer better results for energy- and wavelength-dispersive x-ray analysis and for electron backscatter diffraction (EBSD), where surface contamination can suppress EBSD pattern formation.


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analysisbackscattered electronsBiophotonicsBreakthroughProductsdesktopdry pumpingEBSDEDXelectron backscatter diffractionenergy-dispersive x-ray analysisHitachihydrocarbonsimagingmicroprocessor-controlledMicroscopynondestructiveopticssample cleaningscanning electron microscopescanning transmissionsecondary electronsSEMTest & MeasurementultravioletUVvacuum cleaningvacuum storagewavelength-dispersive x-ray analysisWDXZONESem

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