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Airborne Particle Sensor

Photonics Spectra
Apr 2011
CyberOptics Corp.
Available from CyberOptics Semiconductor Inc., the WaferSense airborne particle sensor moves through semiconductor process equipment and automation materials handling systems to monitor airborne particles. It reports information in real time to allow engineers to efficiently validate wafer contamination. The instrument has a waferlike shape compatible with existing automation, and its wireless communication provides real-time data. The metrology device reduces the time required to locate particle sources, speeding tool qualification and release to production. It also can be used to establish a baseline and to ensure that operations continue on this baseline as part of preventive maintenance. The sensor uses a fan to pull noncorrosive gas or air through a channel, and a laser illuminates the air/gas stream while particles scatter light onto the sensor’s photodiode.

airborne particle sensorairborne particlesAmericasautomation material handlingCyberOptics SemiconductorlasersmetrologyNew Productsproductionquality assurancequality controlsemiconductor process equipmentSensors & DetectorsTest & Measurementwafer contaminationWaferSense

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