AIR-COOLED EXCIMER LASER
Photonics Spectra
Apr 1997ATL Lasertechnik GmbHRequest Info
ATL Lasertechnik GmbH announced its new compact air-cooled excimer
laser systems, which operate at 193, 248 and 308 nm and utilize
total-metal-ceramic technology. The ATLEX SPi lasers have a pulse
energy of about 10 mJ at 248 nm and repetition rates of 200 Hz. The raw
laser beam produces energy density of 100 mJ/cm2, comparable
to that of standard excimer lasers. With pulse lengths of only 3 ns,
the lasers permit extremely high peak power density at 30 mW/cm2.
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