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Vacuum Stages

BioPhotonics
Sep 2011
Steinmeyer Inc.Request Info
 
Steinmeyer Inc. offers a range of precision stages suitable for ultrahigh-vacuum applications. The model MT105-LM-HV is one example. A compact two-axis (X-Z) version has a travel range choice of 30 or 50 mm. Positioning accuracy is 3 μm, with repeatability of ±0.2 μm. This product can be provided as a classic X-Y stage without adapter plate or can be configured as an X-Y-Z system. Driven by a piezo motor, each stage includes stainless steel crossed roller linear bearings for smooth motion and robust load capacity. Both base and saddle are manufactured from high-stiffness aluminum. All other components and hardware are selected for ultrahigh-vacuum use. Exhibiting dynamic performance, the stages are suitable for demanding positioning applications, including scanning electron microscopy.


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AmericasBasic ScienceBiophotonicsBreakthroughProductscleanroom-assembledcrossed rollerCVCMselectron-beam processinghigh-stiffness aluminumlinear bearingslow collected volatile condensable materialslow outgassingMassachusettsMicroscopyMT105-LM-HVparticle acceleratorspiezo motorscanning electron microscopySteinmeyerTest & Measurementtwo-axisvacuum stagesX-YX-Y-ZX-Z

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