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Sensor System

Photonics Spectra
Oct 2011
Armstrong Optical Ltd.Request Info
A noncontact high-precision sensor that provides thickness measurement of infrared silicon and other semi-conductor substrate wafers, doped or undoped, has been unveiled by Precitec Optronik and is available through Armstrong Optical Ltd. The CHRocodile IT sensor system is based on laser diode technology and offers thickness measurement in the range from 18 µm to 3 mm in air, with a resolution of better than 60 nm for silicon. It performs in-line measurements at a 4-kHz sampling rate and can operate in a vacuum. Measurement is independent of variations in temperature and atmospheric moisture, making the system suitable for industrial applications. The easily integrated sensor head comprises a passive lens system with no electronic components or moving parts.


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Armstrong OpticalCHRocodile IT sensor systemdoped wafer thickness measurementEnglandEuropein-line wafer thickness measurementindustrialinfrared silicon wafer thickness measurementNew Productsnoncontact thickness measurementpassive lens systemPrecitec Optroniksemiconductor substrate wafer thickness measurementSensors & DetectorsTest & Measurementundoped wafer thickness measurement

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