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Dry Pump Series

Photonics Spectra
Dec 2011
Edwards VacuumRequest Info
Edwards Ltd. has expanded its iXH family of harsh process dry pumps with the introduction of the iXH500H series, optimized for flat panel, solar and advanced semiconductor processes requiring high gas flows and flexible pump temperature profiles. The pumps offer lower energy consumption and enhanced mean time between servicing, while delivering the small footprint and hydrogen pumping capabilities of the iXH450 series and reducing pump energy consumption by up to 15%. Running at low pump temperatures is beneficial for processes that use high flows of corrosive gases, such as flat panel display plasma-enhanced chemical vapor deposition (PECVD), thin-film solar PECVD and semiconductor metallorganic chemical vapor deposition. High operating temperatures can be used where the risk is condensation of byproducts within the pump.


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