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Nanopositioner Stages

Jan 2012
Aerotech Inc.Request Info
A series of two-axis linear motor nanopositioner stages from Aerotech provide 1-nm resolution with up to 160 x 160-mm travel. The ANT130-XY stages allow travel in two dimensions with a low profile of 85 mm. With repeatability of 75 nm and accuracy of 250 nm per axis, the stages support applications that require high in-position stability and smooth motion. They are designed for use in research-and-development and manufacturing fields, including data storage, laser micromachining, medical, sensor testing, inspection, materials deposition and microelectromechanical systems/nanotechnology device fabrication. The stages use proprietary direct-drive technology and crossed-roller bearings, and the direct-drive technology enables accurate and repeatable motion in both the X- and Y-dimensions.


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