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PX 100 CAP Piezoelectric Nanopositioning Stage
May 2012
piezosystem jena GmbHRequest Info
JENA, Germany, May 31, 2012 — Piezosystem jena has redesigned its PX 100 CAP piezoelectric nanopositioning stage.

The travel range has been extended to 100 μm of motion in closed-loop mode without compromising the stage’s accuracy. For positioning control, a high-resolution capacitive feedback sensor has been built in.

The sensor measures a deviation of the accuracy with subnanometer accuracy and operates in a direct metrology fashion.

Another benefit of the redesign is the height, which has been reduced by 9 mm, so the stage now has outside dimensions of only 40 × 40 × 20 mm. It is appropriate for high-precision positioning of small components, such as mirrors or other optical components. Its high accuracy provides long-term stability under changing conditions.


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closed-loop nanopositioning stageEuropeGermanymetrologynanopositioning stage capacitive feedback sensorpiezoelectric nanopositioning stagepiezosystem jenaposition mirrorsposition optical componentsposition small componentsProductsPX 100 CAPSensors & DetectorsTest & Measurement

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