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Integrated Vertical and Rotation Stage

Photonics Spectra
Sep 2012
Newport CorporationRequest Info
 
Newport Corp. has launched an integrated vertical and rotation stage, the ZVR, for semiconductor wafer positioning, metrology, inspection and repair. It also is useful in LED production, 3-D scanning, digitizing models and validation applications.

It features a rigid design with improved cantilevered load capacity, lower crosstalk and higher dynamic system performance than offered by earlier designs. With a low-profile footprint, low mass and a high natural frequency, the stage accommodates a variety of rapid step-and-settle positioning applications.

The ZVR vertical platform has a wide, three-point base with a stepper-motor-driven 10-mm Z-stage. The integrated rotation stage uses stainless steel ball bearings for smooth operation.

It is available in two models: the ZVR-PP with a stepper motor and the ZVR-PC with a servo-driven DC motor. Both provide continuous 360° rotation for angular travel. An optional linear encoder is available for the Z-stage, which also is available without the rotation stage. The stable three-point bottom interface permits mounting to any X-Y stage or other platform. A large clear aperture through the center of the stage simplifies electrical cable and vacuum-chuck cable/hose management. All electrical and vacuum chuck utility connections are found at a single location.


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AmericasCaliforniametrologyNew ProductsNewportProductsstage 3-D scanningstage digitizing modelsstage inspectionstage LED productionstage metrologystage repairstage semiconductor wafer positioningstage servo-driven DC motorstage step-and-settle positioningstage stepper motorstage validationTest & Measurementvertical and rotation stageZVR-PCZVR-PP

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