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PRECISION STAGE DOCKING

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Technical Manufacturing Corp. has introduced a stage-docking system for pneumatic vibration- isolation systems. FastDock is designed for metrology tools and steppers that require position repeatability for loading and unloading wafers. Using kinematic mounting with roller-bearing mounts, the system is accurate to within ±100 µm. It has a payload docking time of less than 1 s, as well as a comparable refloat time. The FastDock system includes components needed to retrofit isolation systems, including mounting hardware, air tubing, fittings and detailed instructions.

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Published: December 1999

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