Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn

EUV Light Source

Photonics Spectra
Dec 2012
Energetiq Technology Inc.Request Info
WOBURN, Mass., Sept. 26, 2012 — Energetiq Technology Inc. has announced its EQ-10HP 20-W extreme-ultraviolet (EUV) light source for actinic inspection of EUV masks.

It operates at substantially higher input powers than its EQ-10 series predecessors and delivers 20 W of in-band EUV into 2 pi steradians. Its small, stable, inductively driven plasma makes it suitable for use in EUV metrology and inspection applications, and its modular design facilitates integration into a process tool.

 The system includes the proprietary and patented Electrodeless Z-pinch source assembly, vacuum and gas subsystems, a power delivery subsystem and control electronics.


* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address 2:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to the supplier by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
20-W EUV light sourceactinic inspectionAmericasElectrodeless Z-pinchEnergetiq TechnologyEQ-10HPEUV inspectionEUV masksEUV metrologyextreme-ultraviolet light sourceinductively driven plasmalight sourcesMassachusettsmetrologyNew ProductsProductsTest & Measurement

Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2018 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA,
x Subscribe to Photonics Spectra magazine - FREE!
Are you interested in this product?
When you enter your email address and click "Send Request", we will send your contact details to Energetiq Technology Inc. so they may respond to your inquiry directly.

Email Address:
Stop showing me this for the remainder of my visit