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Surface Measuring System

Dec 2012
FRT GmbHRequest Info
Fries Research and Technology GmbH’s MicroScope WLI (white light interferometry) is a surface measuring system based on an optical microscope. It is supplied with a full white light interferometer for nondestructive measurement, enabling 3-D measurements on a surface with high vertical resolution.

The compact surface metrology system includes an optical microscope with a fourfold turret equipped with a piezoelectric drive for the WLI objective. It is used for R&D and university biology and medical laboratories, and it provides information about roughness, step height, profiles and 3-D structures.

The motorized X-Y stage has a travel range of 100 × 100 mm. The axial measurement range is 400 µm. The system includes a PC with proprietary Mark III software for profile and topography analysis and data evaluation; and a number of 2- and 3-D filters. Average measurement time is a few seconds.

In addition to the interferometer objectives, three standard microscope objectives may be mounted.


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2-D filters3-D filters3-D measurement3-D structuresBiophotonicsEuropeFiltersfourfold turretFries Research and TechnologyGermanyMark III softwaremetrologyMicroScope WLIMicroscopymotorized X-Y stagenondestructive measurementoptical microscopeopticspiezoelectric driveProduct PreviewProductsprofilesroughnessstep heightsurface measuringTest & Measurementwhite light interferometer

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