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UV Laser

Photonics Spectra
Jun 2013
Coherent Inc.Request Info
SANTA CLARA, Calif., April 4, 2013 — Coherent Inc. has expanded its family of ultraviolet micromachining lasers with the Avia 355-33. Delivering 33 W of output at 355 nm (110 kHz), the laser is suitable for a variety of demanding, high-throughput microelectronics fabrication applications, including via-hole drilling in printed circuit boards and flip chips, and in dicing and scribing of silicon wafers containing low-k dielectric materials.

It features enhanced processing capabilities that minimize long-term cost of ownership, including ThermEQ, PulseEQ and PulseTrack, which enable precise control of delivered pulse energy and allow the OEM to define and optimize laser processes.

The laser has an automated harmonic crystal shifter to maintain constant output power for >20,000 h and to maximize lifetime. Its Posilock beam position sensor and feedback loop provide very high beam position stability over the life of the laser, ensuring process consistency.


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