Hardware Autofocus/Cleanroom Kit
Carl Zeiss Spectroscopy GmbHRequest Info
Carl Zeiss Microscopy GmbH’s hardware autofocus and cleanroom kit was designed for its Axio Imager Vario microscope system to enable faster, more precise in-process inspection.
An integratable autofocus system ensures fast and precise focusing for surface inspections on reflective, low-contrast samples. In transmitted and reflected light (bright field, dark field, polarization contrast and oblique illumination), it ensures high precision down to 0.3 of the depth of field of the objective lens. The sensor registers changes to the focus position and automatically compensates any deviations via direct access to the microscope’s Z-drive. This enables even large samples such as monitors and solar panels to remain constantly in the user’s focus in the X-Y direction.
The hardware autofocus is fully integrated in modules such as MosaiX for automated overview image capture. Axio is certified for cleanroom use in accordance with DIN EN ISO 14644-1 and, with the cleanroom kit, fulfills the requirements of ISO 5, the most commonly used cleanroom class. Accessories such as the 7x turret with particle protection and sneeze guard ensure that samples such as wafers and photomasks are clean at all times.
https://www.zeiss.com/spectroscopy
/Buyers_Guide/Carl_Zeiss_Spectroscopy_GmbH/c16323
Published: June 2013
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:
When you click "Send Request", we will record and send your personal contact information to Carl Zeiss Spectroscopy GmbH by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our
Privacy Policy and
Terms and Conditions of Use.
Register or login to auto-populate this form:
Login
Register
* Required