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Photonics Spectra
Feb 2000
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
tMEASURPhysik Instrumente GmbH & Co. presents its family of capacitive displacement sensing systems for static and dynamic measurements. With a resolution <0.1 nm and a range of 15 to 500 µm, the systems are designed for applications in optics, semiconductor manufacturing and testing, scanning microscopy, interferometry, micropositioning and microlithography. They include a standard electronic module and a pair of sensors, which can be exchanged to vary the measurement range without recalibration.


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