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Spectral Reflectometer

Aug 2014
Verity Instruments Inc.Request Info
The SP2100 Spectral Reflectometer from Verity Instruments is designed for film thickness measurement of in-situ and inline applications.

Consisting of a high-performance spectrometer and xenon flashlamp, the system has a 2-D, thermoelectrically cooled CCD array to allow simultaneous monitoring of one to six fiber optic inputs. Uniformity measurement of six points on the same substrate is possible.

The integrated xenon flashlamp provides high intensity and wide spectral range illumination while separating contaminating background light with an alternating flashlamp mode. The device can also provide unblurred measurements of a moving substrate.

Verity’s SpectraView application software provides the SP2100 with film thickness determination through a variety of open algorithms.


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AmericasApplicationsarrayBiophotonicsCCDcooledfiber opticsfilmflashlampHigh-Performanceilluminationin-linein-situinputintensitylightmodemonitormovingProductsrangespectralspectral reflectometerspectroscopysubstrateTest & MeasurementthicknessuniformityVerity InstrumentsXenonSP2100thermoelectricitycontaminatebackgroundunblurred

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