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Piezo Screw Drive

Photonics Spectra
Jun 2015
piezosystem jena GmbHRequest Info
JENA, Germany — Pizeosystem Jena MICIPizeosystem Jena GmbH has announced a hybrid nanopositioning element for improving resolution of linear stages, quality control, automation, fine adjustment of optical components and micro-assembly.

The MICI systems consist of a piezoelectric actuator in combination with a micrometer screw drive. The user can first adjust the coarse position of the actuator with a micrometer screw, and then fine-tune it with the piezo stage itself. This improves the accuracy and reproducibility of the linear stage significantly.

Travel ranges up to tens of millimeters are possible depending on the micrometer screw, and subnanometer resolution can be reached while simultaneously moving high loads up to 20 kg with the MICI 80. Solid-state flexure hinge technology allows the stages to move without mechanical play. Stages can be driven at high frequencies.

Four models, compatible with Mitutoyo, Newport or Qioptic micrometer drives, are available.


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