Search
Menu
Gentec Electro-Optics Inc   - Measure With Gentec Accuracy LB

Linear Motor Stage

Aerotech Inc.Request Info
 
Facebook X LinkedIn Email
PITTSBURGH, June 17, 2015 — Aerotech PlanarDLAAerotech Inc. has introduced the PlanarDLA series of integrated, open-frame, low-profile linear motion stages.

Applications range from two-sided LED wafer processing, where high dynamics and micron-level straightness are required, to quasistatic optical metrology, where high-accuracy and precise geometric performance are necessary.

High-precision roller bearings, precision-machined surfaces and noncontact direct-drive linear motors driving through the axes' centers of stiffness result in a positioning stage with straightness to ±0.5 μm and flatness to ±1.25 μm. The stages enable high-throughput processing with 2-m/s velocities and 2-g accelerations.

Stages are available with one or two motors per axis, allowing optimization of each axis for the specific application and process. Three versions are available, including the Plus and Ultra options that enable accuracies and straightness values to ±500 nm and orthogonality to 5 μrad.





Published: June 2015
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:


When you click "Send Request", we will record and send your personal contact information to Aerotech Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.

Register or login to auto-populate this form:
Login Register
* Required

Photonics Marketplace
Looking for Linear Motors? There are 18 companies listed in the Photonics Buyers' Guide.
Browse Cameras & Imaging, Lasers, Optical Components, Test & Measurement, and more.
ProductsAmericasPennsylvaniaAerotechpositioningLEDsmetrologyindustrial

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.