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EUV Spectrometer

Industrial Photonics
Oct 2015
McPhersonRequest Info
CHELMSFORD, Mass. — McPherson 251MXThe 251MX spectrometer from McPherson Inc. is now available with improved efficiency over a wider range and a gold-coated diffraction grating.

Suitable for work from 20 to 80 nm, the grating enables measurements of extreme-ultraviolet (EUV), vacuum-ultraviolet radiation, as well as soft x-rays, with subnanometer resolution. To resolve closely spaced spectral lines, an adjustable slit width provides the best light throughput and better spectral resolution.

Applications include plasma physics, astrophysics, and spectral testing and calibration, as well as source and process development for attosecond pulses, high-harmonic lasers and semiconductor lithography.


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