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Wafer Analyzer

Industrial Photonics
Oct 2016
Nanophoton Corp.Request Info
OSAKA, Japan — Nanophoton Wafer AnalyzerNanophoton Corp. has announced the RAMANdrive wafer analyzer with sub-μm resolution.

The device provides stress, polytype and defect distributions in three dimensions. The 300-mm stage was developed for accurate and safe analysis of the whole wafer, while the Raman imaging system provide high-performance data.

Data is implemented from the regular inspection system and used to move the wafer to all positions for a detailed analysis. The RAMANdrive uses high-quality dark-field microscopy to easily localize particles smaller than 100 nm.


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