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Motorized Stepper Stage

Photonics Spectra
Jan 2017
Prior Scientific Instruments Ltd.Request Info
FULBOURN, England — Motorized Stepper StageThe H116 motorized stepper stage from Prior Scientific Ltd. can scan a wide range of semiconductor wafers, photo masks, flat panel displays and printed circuit boards.

The device is suited for use with larger microscopes and can accommodate 8-in. wafers and a variety of large specimens. Offering a travel range of more than 255 x 216 mm, the large area scanning capability of the H116 stage has a minimum step size of 0.04 μm and a repeatability of +/-0.7 μm.

The stage is manufactured using precision bearings, zero backlash recirculating ball screws, X and Y limit switches, two high precision stepper motors and a scratch resistant coating.


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