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Light Source Productivity Package

Photonics Spectra
Oct 2017
Cymer Inc.Request Info
 
SAN DIEGO — Cymer has announced a new productivity package with enhanced chamber and optics technology for its installed base of argon fluoride light sources.

The next-generation solution enables chipmakers to extend the time between service events by 33 percent over earlier generations. By providing an interval of 40 Bp, chipmakers are able to achieve higher availability due to reduced maintenance frequency that can lead to increased fab output.

The new chamber technology is available on all Cymer platforms. The chamber is redesigned with novel materials as well as applied special coatings and high purity materials to its supporting optics for the extension of useful life for both critical components.


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