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Cognex Corp. - Smart Sensor 3-24 GIF LB

TWO-AXIS STEERING MIRRORS

MKS/NewportRequest Info
 
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Fast steering mirrors developed by Newport Corp. offer two-axis, high-bandwidth motion with microradian resolution. Flexure suspension confines the motion of the mirror for a single pivot point on or near the surface of the mirror for both X and Y stictionless rotation and thermal isolation from heat-generating components. The mirrors come with an external position-sensing detector that allows them to lock to the detector for rapid laser beam control and stabilization. Other features include closed-loop control up to 3 kHz, angular resolution <1 µrad and wavefront distortion < l/10. The mirrors are available from the UV to the IR for applications such as scanning, tracking, pointing, image and beam stabilization, and beam autoalignment.


Published: March 2001
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