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Optimax Systems, Inc. - Optical Components & Systems 2024 LB

ETCH PROCESS MONITORING

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MKS Instruments Inc.
The Spectra Vision 1000-C and -E in situ process monitoring systems from MKS Instruments Inc. continuously collect and interpret data from chemical vapor deposition process tools and etch tools using a closed ion source analyzer and a close-coupled automated inlet. The Unibloc inlet valve automates the sampling of background and process gases with the recipe-driven software. The valve and analyzer are automatically isolated from the process chamber and purged with inert gas to keep the source clean when the systems are not sampling.See full product

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