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Alluxa - Optical Coatings LB 8/23

QC-500 Cracker

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Incorporates Sublimator and Phosphorous Conversion Buffer Zones
Oxford Applied Research Ltd.
NEWARK, N.J., Jan. 14 -- OAR introduces its QC-500 cracker, which enables the generation of atomic species from solid phosphorous or arsenic. The source incorporates a sublimator zone as well as a red-to-white phosphorous conversion buffer zone to avoid pressure bursts seen in conventional two-zone cracker systems.    The sublimated material passes through a high-purity all-quartz valve into the RF-excited cracker zone. In contrast to thermal cracking, the RF plasma acts to dissociate the material to the more reactive atomic form allowing a higher growth rate and dopant incorporation to be...See full product

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