Request InfoCoherent Inc.SANTA CLARA, Calif., July 24, 2006 -- The new ExciStar XS from Coherent Inc. is a compact, economical excimer laser that the company said offers exceptional performance and lifetime characteristics. The air-cooled ExciStar XS measures only 649 x 300 x 400 mm, yet delivers up to 10 mJ/pulse at 193 nm with an energy stability of < 2% (1 s), at repetition rates of up to 500 Hz. The use of Almeta XS all-metal-tube construction, corona preionization, an all-solid-state pulser and electrostatic dust removal combine to yield a laser tube lifetime of 500 million pulses and an optics lifetime of 100 million pulses. 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