Request InfoCoherent Inc.SANTA CLARA, Calif., July 2, 2007 -- New pulse-energy sensors from Coherent Inc. are optimized for use with ArF lasers operating at 193 nm and with KrF lasers at 248 nm. The EnergyMax series sensors feature high accuracy and a large active area and use a novel coating that delivers superior long-term damage resistance. They can perform pulse-energy measurements from 50 to 250 mJ, operate at repetition rates from single shot to 400 Hz and are compatible with Coherent 3sigma, FieldMaxII-TOP, FieldMaxII-P, EPM1000 and EPM2000 meters, Coherent said. The excimer laser EnergyMax series comprises four individual products. These...See full productRelated content from Photonics MediaPRODUCTSPhotonics Spectra August 2023 IssueLithography SystemThe NSR-S625E argon fluoride (ArF) immersion scanner from Nikon Corp. is optimized for middle critical layers. 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