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MultiBeam SEM-FIB System

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For Micromilling and High-Res SEM Imaging
JEOL USA Inc.
PEABODY, Mass. Nov. 29, 2007 -- JEOL USA Inc. said its new high-throughput JIB-4500 MultiBeam SEM-FIB (scanning electron microscope, focused ion beam) combines the high-resolution imaging of the JEOL LaB6 electron column with real-time micromilling and monitoring capability. The MultiBeam is a high-productivity tool for integrated circuit defect analysis, circuit modification, TEM (transmission electron microscope) thin-film sample preparation, and mask repair. A versatile all-in-one system, the MultiBeam features serial slicing and sampling (S3) for in-process monitoring of milling, fabrication, and reconstructing...See full product

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