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Bristol Instruments, Inc. - 872 Series High-Res 4/24 LB

Helios

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Sputtering System
Buhler Inc., Business Area Leybold Optics
CARY, N.C., Aug. 5, 2009 – Leybold Optics USA Inc. has expanded its line of Helios sputtering tools for optical coatings with the launch of a tool that features 12 substrate stations that measure 8 in. each. The company says that the new item produces higher throughput than the standard 4-in. model. The new offering features up to three dual-magnetron sputtering sources working at mid-frequency and operating from metal or sub-oxide targets in a reactive mode, resulting in a high deposition rate. An additional oxygen plasma source is used to achieve fully stoichiometric thin-film layers for high density and low...See full product

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