Search
Menu
Lambda Research Optics, Inc. - DFO

Abatement System

Facebook X LinkedIn Email
Request Info
Edwards Vacuum
Edwards Ltd. has unveiled the Spectra ZW abatement system for solar cell and flat panel manufacturing. The compact instrument, which includes an integrated wet scrubbing system, provides particulate and acid gas capture in a high-flow chemical vapor deposition process. It can function as a stand-alone unit, or it can be integrated into the proprietary Zenith for a custom-built vacuum pump/abatement solution, or combined with the optional wet electrostatic precipitation unit. It features standard process flows of greater than 16 standard l/min of silane, 200 standard l/min of hydrogen and 40...See full product

Related content from Photonics Media



    PRODUCTS


    ARTICLES


    PHOTONICS HANDBOOK ARTICLES


    WHITEPAPERS


    WEBINARS


    PHOTONICS DICTIONARY+ TERMS


    VIDEOS


    PHOTONICS BUYERS' GUIDE CATEGORIES


    COMPANIES


    We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.