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Hamamatsu Corp. - Earth Innovations LB 2/24

WaferSense Auto Gapping System

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CyberOptics Corp.
WILSONVILLE, Ore., June 25, 2010 — CyberOptics Semiconductor Inc.’s WaferSense Auto Gapping System, the AGS300, is available in 300- and 200-mm form factors. It measures gaps that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etching. Consisting of three capacitive distance sensors, the system measures the gaps between shower heads and pedestals at three points that define a plane to ensure accurate and reproducible equipment setups. Using the system, engineers can better control gap uniformity and magnitude with high stability over time. While legacy gap...See full product

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