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Deposition Sciences Inc. - Difficult Coatings - LB - 8/23

Automated Load-Lock System

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Buhler Inc., Business Area Leybold Optics
Leybold Optics USA has added a fully automated load-lock system to its portfolio of evaporation tools for the liftoff process. The liftoff system incorporates an electron beam source with a multipocket hearth for metal evaporation. The process and chamber geometry are optimized for evaporation of metals such as titanium, platinum and gold. The plasma source can be used for precleaning of substrates as well as for ion-assisted deposition and can be operated with pure argon or oxygen as well as with mixes thereof. The measurement of the film thickness is done through a quartz monitor with...See full product

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