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Zurich Instruments AG - Boost Your Optics 1-24 LB

Airborne Particle Sensor

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CyberOptics Corp.
Available from CyberOptics Semiconductor Inc., the WaferSense airborne particle sensor moves through semiconductor process equipment and automation materials handling systems to monitor airborne particles. It reports information in real time to allow engineers to efficiently validate wafer contamination. The instrument has a waferlike shape compatible with existing automation, and its wireless communication provides real-time data. The metrology device reduces the time required to locate particle sources, speeding tool qualification and release to production. It also can be used to establish...See full product

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