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Lumencor Inc. - ZIVA Light Engine 3-24 LB

Electron Microscope Decontaminator

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XEI Scientific Inc.
REDWOOD CITY, Calif., April 13, 2011 — XEI Scientific Inc., manufacturer of the Evactron plasma cleaning system for electron microscopes and other vacuum chambers, has announced that the product can be used to clean carbon decontamination using hydrogen. According to the company, atomic hydrogen created by the Evactron plasma is effective in cleaning carbon contamination from extreme-ultraviolet (EUV) optics. All Evactron decontaminator systems use radio-frequency plasma to produce oxygen radicals that flow downstream through the chamber, removing contamination. They also are safe for use on x-ray windows and are delivered...See full product

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