Request InfoSensofar MetrologyBARCELONA, Spain, May 5, 2015 — Suited for integration into automated production systems, the S mart 3-D optical sensor system from Sensofar Corp. can be used for inline process measurement and process control tasks. The S mart combines confocal, interferometry and focus variation techniques in the same sensor head. When combined with a single LED light source, the system allows users to make noninvasive assessments of 3-D surface micro- and nanogeometry. Applications include all stages of micromanufacturing, automatic optical inspection, 3-D measurement of semiconductors and surface characterization for...See full productRelated content from Photonics MediaPRODUCTSPhotonics Spectra May 2024 IssueLaser InterferometerThe Qualifire™ from Zygo Corporation is a laser interferometer designed to support metrology applications in industries such as semiconductor, lithography, space-borne imaging systems,...Photonics Spectra August 2023 IssueSemiconductor Metrology ToolThe FRT MicroProf® PT from FormFactor Inc. is a metrology and inspection system for high-throughput panel measurement in advanced packaging. The system is capable of handling rectangular...Photonics Spectra October 2023 IssueWafer Measurement SystemThe NEXIV VMZ-NWL 200 from Nikon is an automatic wafer measurement system developed to solve the challenges of wafer metrology in the back-end of the semiconductor manufacturing process. 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