Request InfoCymer Inc.Cymer has announced a new productivity package with enhanced chamber and optics technology for its installed base of argon fluoride light sources. The next-generation solution enables chipmakers to extend the time between service events by 33 percent over earlier generations. By providing an interval of 40 Bp, chipmakers are able to achieve higher availability due to reduced maintenance frequency that can lead to increased fab output. The new chamber technology is available on all Cymer platforms. The chamber is redesigned with novel materials as well as applied special coatings...See full productRelated content from Photonics MediaPRODUCTSPhotonics.com 2/6/2024VCSEL Illumination ModuleThe illumination module platform from Coherent can be used for short- and mid-range lidar in automotive safety and robotic vision in industrial applications. 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