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Advances in Precision Motion Control - Part I = Piezo Flexure Mechanisms, Part II = Air Bearings

Author: Stefan Vorndran and Matt Reck
Friday, June 01, 2018
Piezo flexure nanopositioners and air bearings are on the leading edge of precision motion control. Whether it’s the precision, speed, and force of an electro-ceramic piezo actuator or the vibration-free frictionless motion, geometric performance and repeatability of an air bearing, advances are being made in the functionality as well as in the applications use for both types of systems.
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File: Motion_Control_Applications_for_Piezo_Flexure.pdf (1.11 MB)
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Test & Measurementpositioningfiber opticsPI (Physik Instrumente)Flexure actuatornanometer precisionpiezo actuatorpiezo motorprecision actuatorNanopositioningpiezoelectric actuatorair bearingprecision motion controllinear actuatorPrecision Positioning System
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