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Micronic Receives SEMI Award

Photonics.com
Oct 2001
TABY, Sweden, Oct. 01 -- Micronic Laser Systems said that four of its scientists have been recognized by Semiconductor Equipment and Materials International (SEMI) for their breakthrough contributions to laser pattern generation technology. Micronic is the first European company to receive the North American SEMI award for advancement of semiconductor manufacturing technology.

Anders Thuren, Hans Buhre, Tor Sandstrom and Gerhard Westerberg (deceased) were honored for their work in developing laser pattern generation technology, which is used in the manufacture of semiconductors and flat panel displays (FPDs). The team began their work in 1971 and developed the first commercial laser writer sold to the IC photomask industry in 1976.

The Micronic team was honored along with a team of scientists from Etec Systems, an Applied Materials Co.



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